A force measuring microsystem bases on electrothermal V-shaped actuator

Simulation of a Microgripper with Electrothermal Actuator Using COMSOL Software Based on the Finite Element Method

Micro-electro-mechanical systems (MEMs) are Combination of electrical and mechanical components in Micron dimensions. In recent years, holding, actuating methods and handling of MEMs components such as microgripper, microsensors and etc. have been deeply studied. Microgrippers for handling, positioning and assembling of micro components are very useful so that for clamping need actuation create...

Simulation of a Microgripper with Electrothermal Actuator Using COMSOL Software Based on the Finite Element Method

Micro-electro-mechanical systems (MEMs) are Combination of electrical and mechanical components in Micron dimensions. In recent years, holding, actuating methods and handling of MEMs components such as microgripper, microsensors and etc. have been deeply studied. Microgrippers for handling, positioning and assembling of micro components are very useful so that for clamping need actuation create...

Parallel-beamslever Electrothermal Out-of-plane Actuator

We report on the design, modeling, fabrication and testing of a new electrothermal actuator allowing for various modes of movement and exhibiting large enough forces to be usable in a micro-tribotester. The performance of the actuator has been simulated combiniig numerical and analytical calculations. Experiments have been performed in ambient conditions and vacuum. The theoretical results and ...

GDQEM Analysis for Free Vibration of V-shaped Atomic Force Microscope Cantilevers

V-shaped and triangular cantilevers are widely employed in atomic force microscope (AFM) imaging techniques due to their stability. For the design of vibration control systems of AFM cantilevers which utilize patched piezo actuators, obtaining an accurate system model is indispensable prior to acquiring the information related to natural modes. A general differential quadrature element method (...

Spatially Varied Flow Profiles in a V-Shaped Side-Channel